Mechanism of Metal Oxide Deposition from Atomic Layer Deposition inside Nonreactive Polymer Matrices: Effects of Polymer Crystallinity and Temperature

Stas Obuchovsky, Hadar Frankenstein, Jane Vinokur, Anna K. Hailey, Yueh Lin Loo, Gitti L. Frey

Research output: Contribution to journal › Article › peer-review

22 Scopus citations

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Engineering & Materials Science

Chemical Compounds