Mechanics of TFT Technology on Flexible Substrates

Sigurd Wagner, Helena Gleskova, I. Chun Cheng, James C. Sturm, Z. Suo

Research output: Chapter in Book/Report/Conference proceedingChapter

51 Scopus citations
Original languageEnglish (US)
Title of host publicationFlexible Flat Panel Displays
PublisherJohn Wiley & Sons, Ltd
Pages263-283
Number of pages21
ISBN (Print)9780470870488
DOIs
StatePublished - Jun 15 2005

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Keywords

  • Amorphous silicon (a-Si) TFT structure
  • Amorphous silicon (a-Si) thin film transistors (TFTs)
  • Controlling mask overlay alignment
  • Film stress
  • Plastic deformation
  • Roll-to-roll
  • TFT backplane

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