Measuring the surface roughness of sputtered coatings by microgravimetry

Michael D. Carolus, Steven L. Bernasek, Jeffrey Schwartz

Research output: Contribution to journalArticlepeer-review

16 Scopus citations


A novel application of quartz crystal microgravimetry is described to enable determination of the roughness of native and sputtered oxide coatings. The technique is applicable to coatings that may be too rough for accurate atomic force microscopic imaging where measurements may be limited by the dimensions of the probe tip.

Original languageEnglish (US)
Pages (from-to)4236-4239
Number of pages4
Issue number9
StatePublished - Apr 26 2005

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Spectroscopy
  • General Materials Science
  • Surfaces and Interfaces
  • Electrochemistry


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