Measuring the surface roughness of sputtered coatings by microgravimetry

Michael D. Carolus, Steven L. Bernasek, Jeffrey Schwartz

Research output: Contribution to journalArticle

13 Scopus citations

Abstract

A novel application of quartz crystal microgravimetry is described to enable determination of the roughness of native and sputtered oxide coatings. The technique is applicable to coatings that may be too rough for accurate atomic force microscopic imaging where measurements may be limited by the dimensions of the probe tip.

Original languageEnglish (US)
Pages (from-to)4236-4239
Number of pages4
JournalLangmuir
Volume21
Issue number9
DOIs
StatePublished - Apr 26 2005

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Spectroscopy
  • Electrochemistry

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