Measuring the surface roughness of sputtered coatings by microgravimetry

Michael D. Carolus; Steven L. Bernasek; Jeffrey Schwartz

doi:10.1021/la0470582

Measuring the surface roughness of sputtered coatings by microgravimetry

Michael D. Carolus, Steven L. Bernasek, Jeffrey Schwartz

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

A novel application of quartz crystal microgravimetry is described to enable determination of the roughness of native and sputtered oxide coatings. The technique is applicable to coatings that may be too rough for accurate atomic force microscopic imaging where measurements may be limited by the dimensions of the probe tip.

Original language	English (US)
Pages (from-to)	4236-4239
Number of pages	4
Journal	Langmuir
Volume	21
Issue number	9
DOIs	https://doi.org/10.1021/la0470582
State	Published - Apr 26 2005

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Spectroscopy
General Materials Science
Surfaces and Interfaces
Electrochemistry

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10.1021/la0470582

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@article{098b7150988c45f491b2383d29704b59,

title = "Measuring the surface roughness of sputtered coatings by microgravimetry",

abstract = "A novel application of quartz crystal microgravimetry is described to enable determination of the roughness of native and sputtered oxide coatings. The technique is applicable to coatings that may be too rough for accurate atomic force microscopic imaging where measurements may be limited by the dimensions of the probe tip.",

author = "Carolus, {Michael D.} and Bernasek, {Steven L.} and Jeffrey Schwartz",

year = "2005",

month = apr,

day = "26",

doi = "10.1021/la0470582",

language = "English (US)",

volume = "21",

pages = "4236--4239",

journal = "Langmuir",

issn = "0743-7463",

publisher = "American Chemical Society",

number = "9",

}

TY - JOUR

T1 - Measuring the surface roughness of sputtered coatings by microgravimetry

AU - Carolus, Michael D.

AU - Bernasek, Steven L.

AU - Schwartz, Jeffrey

PY - 2005/4/26

Y1 - 2005/4/26

N2 - A novel application of quartz crystal microgravimetry is described to enable determination of the roughness of native and sputtered oxide coatings. The technique is applicable to coatings that may be too rough for accurate atomic force microscopic imaging where measurements may be limited by the dimensions of the probe tip.

AB - A novel application of quartz crystal microgravimetry is described to enable determination of the roughness of native and sputtered oxide coatings. The technique is applicable to coatings that may be too rough for accurate atomic force microscopic imaging where measurements may be limited by the dimensions of the probe tip.

UR - http://www.scopus.com/inward/record.url?scp=18544371027&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=18544371027&partnerID=8YFLogxK

U2 - 10.1021/la0470582

DO - 10.1021/la0470582

M3 - Article

C2 - 15836000

AN - SCOPUS:18544371027

SN - 0743-7463

VL - 21

SP - 4236

EP - 4239

JO - Langmuir

JF - Langmuir

IS - 9

ER -

Measuring the surface roughness of sputtered coatings by microgravimetry

Abstract

All Science Journal Classification (ASJC) codes

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