Measurements of the electron energy distribution function in molecular gases in an inductively coupled plasma

Keyphrases

• Argon 60%
• Atomic Gases 20%
• Collision Cross Section 20%
• Cylindrical Langmuir Probe 20%
• Degree of Dissociation 20%
• Electron Energy Distribution Function 100%
• Fluorocarbon Plasma 20%
• Gas Mixture 20%
• High Pressure 20%
• High Temperature 40%
• High-energy Tail 20%
• Inductively Coupled Plasma 100%
• Intermediate Energy 20%
• Ionic Composition 20%
• Langmuir Probe Measurements 20%
• Low Energy 20%
• Low Pressure 40%
• Low Temperature 20%
• Mass Spectrometry 20%
• Maxwellian 40%
• Molecular Gas 100%
• Molecular Ions 20%
• N2 Plasma 40%
• Neutral Component 20%
• Non-Maxwellian 20%
• Nonlocal Theory 20%
• O2 Plasma 40%
• Oxygen Plasma 20%
• Temperature Distribution 20%
• Temperature Structure 20%
• Three-temperature 20%
• Two-temperature 20%

Physics

• Distribution Function 100%
• Electron Energy 100%
• Electron Scattering 20%
• Electrostatic Probe 40%
• Energy Distribution 100%
• Gas Mixture 20%
• Mass Spectroscopy 20%
• Molecular Gas 100%
• Molecular Ion 20%
• Monatomic Gas 20%
• Oxygen Plasma 20%
• Temperature Distribution 20%