Measurements of the electron energy distribution function in molecular gases in an inductively coupled plasma

Physics & Astronomy

• molecular gases 100%
• energy distribution 78%
• distribution functions 70%
• electron energy 67%
• argon 29%
• electrostatic probes 28%
• low pressure 21%
• accident prevention 16%
• fluorocarbons 16%
• monatomic gases 15%
• oxygen plasma 14%
• molecular ions 14%
• gases 13%
• mass spectroscopy 12%
• gas mixtures 12%
• electron scattering 11%
• dissociation 10%
• temperature distribution 10%
• collisions 8%
• energy 7%
• cross sections 7%
• molecules 6%
• electrons 5%
• temperature 3%