Maximizing uniaxial tensile strain in large-area silicon-on-insulator islands on compliant substrates

Material Science

• Silicon 100%
• Tensile Strain 100%
• Germanium 40%
• Strained Silicon 40%
• Si-Ge Alloys 20%

Keyphrases

• Generation Process 33%
• Structural Geometry 33%
• Process Window 33%
• Strain Generation 33%
• Silicon Germanium on Insulator 33%

Engineering

• Process Window 50%
• Structural Geometry 50%