Abstract
Real-time diagnostics of cold atmospheric plasma (CAP) sources can be challenging due to the requirement for expensive equipment and complicated analysis. Data analytics that rely on machine learning (ML) methods can help address this challenge. In this paper, we demonstrate the application of several ML methods for real-time diagnosis of CAPs using informationrich optical emission spectra and electro-acoustic emission. We show that data analytics based on ML can provide a simple and effective means for estimation of operation-relevant parameters such as rotational and vibrational temperature and substrate characteristic in real-time. Our findings indicate a great potential promise for ML for real-time diagnostics of CAPs.
Original language | English (US) |
---|---|
Article number | 8685139 |
Pages (from-to) | 597-605 |
Number of pages | 9 |
Journal | IEEE Transactions on Radiation and Plasma Medical Sciences |
Volume | 3 |
Issue number | 5 |
DOIs | |
State | Published - Sep 2019 |
Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
- Instrumentation
- Radiology Nuclear Medicine and imaging
Keywords
- Cold atmospheric plasma (CAP)
- Electroacoustic signal
- Gaussian process (GP)
- K-means clustering
- Linear regression
- Machine learning (ML)
- Optical emission spectrum (OES)
- Real-time diagnostics