Low energy neutral spectroscopy during pulsed discharge cleaning in PLT

D. Ruzic; S. Cohen; B. Denne; J. Schivell

doi:10.1116/1.572002

Low energy neutral spectroscopy during pulsed discharge cleaning in PLT

D. Ruzic, S. Cohen, B. Denne, J. Schivell

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

The efflux of neutral hydrogen from PLT during discharge cleaning has been measured using a time-of-flight spectrometer. During high ionization pulsed discharge cleaning (PDC), the flux in the energy range of 5 to 1000 eV varies from 10¹⁴ H⁰/cm².s to 10¹⁶ H⁰/cm².s and the average energy from 10 to 80 eV. The energy distributions are nearly single temperature Maxwellians. Low ionization PDC (Taylor-type) produces a 1000 times lower fluence in the same energy range; however, a flux of 10¹⁶ H⁰/cm².s at energies less than 5 eV is inferred. The detailed submillisecond time variation of these parameters with the fill gas pressure and state of cleanliness of the machine is presented. Comparisons with UV spectroscopy, bolometric measurements, and residual gas analysis are made.

Original language	English (US)
Pages (from-to)	818-821
Number of pages	4
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	1
Issue number	2
DOIs	https://doi.org/10.1116/1.572002
State	Published - Apr 1 1983

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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title = "Low energy neutral spectroscopy during pulsed discharge cleaning in PLT",

abstract = "The efflux of neutral hydrogen from PLT during discharge cleaning has been measured using a time-of-flight spectrometer. During high ionization pulsed discharge cleaning (PDC), the flux in the energy range of 5 to 1000 eV varies from 1014 H0/cm2.s to 1016 H0/cm2.s and the average energy from 10 to 80 eV. The energy distributions are nearly single temperature Maxwellians. Low ionization PDC (Taylor-type) produces a 1000 times lower fluence in the same energy range; however, a flux of 1016 H0/cm2.s at energies less than 5 eV is inferred. The detailed submillisecond time variation of these parameters with the fill gas pressure and state of cleanliness of the machine is presented. Comparisons with UV spectroscopy, bolometric measurements, and residual gas analysis are made.",

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T1 - Low energy neutral spectroscopy during pulsed discharge cleaning in PLT

AU - Ruzic, D.

AU - Cohen, S.

AU - Denne, B.

AU - Schivell, J.

PY - 1983/4/1

Y1 - 1983/4/1

N2 - The efflux of neutral hydrogen from PLT during discharge cleaning has been measured using a time-of-flight spectrometer. During high ionization pulsed discharge cleaning (PDC), the flux in the energy range of 5 to 1000 eV varies from 1014 H0/cm2.s to 1016 H0/cm2.s and the average energy from 10 to 80 eV. The energy distributions are nearly single temperature Maxwellians. Low ionization PDC (Taylor-type) produces a 1000 times lower fluence in the same energy range; however, a flux of 1016 H0/cm2.s at energies less than 5 eV is inferred. The detailed submillisecond time variation of these parameters with the fill gas pressure and state of cleanliness of the machine is presented. Comparisons with UV spectroscopy, bolometric measurements, and residual gas analysis are made.

AB - The efflux of neutral hydrogen from PLT during discharge cleaning has been measured using a time-of-flight spectrometer. During high ionization pulsed discharge cleaning (PDC), the flux in the energy range of 5 to 1000 eV varies from 1014 H0/cm2.s to 1016 H0/cm2.s and the average energy from 10 to 80 eV. The energy distributions are nearly single temperature Maxwellians. Low ionization PDC (Taylor-type) produces a 1000 times lower fluence in the same energy range; however, a flux of 1016 H0/cm2.s at energies less than 5 eV is inferred. The detailed submillisecond time variation of these parameters with the fill gas pressure and state of cleanliness of the machine is presented. Comparisons with UV spectroscopy, bolometric measurements, and residual gas analysis are made.

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Low energy neutral spectroscopy during pulsed discharge cleaning in PLT

Abstract

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