Low-energy electron beam source

Experimental results of research into a ferroelectric-plasma-source- assisted hollow anode (HA) discharge as a source of low-energy electron beams are presented. To generate electron beams, the HA auto-bias negative voltage was achieved by the discharge current flowing through the resistor connecting the HA and the grounded electrode. It is shown that this method allows reliable and reproducible generation of low-energy electron beams with electron energy of several hundreds of eV, electron current density up to several A/cm2 and pulse duration of several tens of microseconds.