Abstract
We observed, and believe it to be the first time, the self-formation of periodic, supramolecular (micrometer scale) pillar arrays in a thin, single-homopolymer film melt, which was originally fiat on a plate. The self-formation was induced by placing a second plate (called a mask) a distance above the polymer film. The pillars, formed by rising against the gravitational force and surface tension, bridge the two plates. The pillar height is equal to the plate-mask separation, which is two to seven times the film's initial thickness. If the surface of the mask has a protruding pattern (e.g., a triangle or rectangle), the pillar array can be formed only-under the protruding pattern with the edge of the array aligned to the boundary of the mask pattern. We also discuss a model and novel applications of lithographically induced self-assembly.
Original language | English (US) |
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Pages (from-to) | 3197-3202 |
Number of pages | 6 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 17 |
Issue number | 6 |
DOIs | |
State | Published - 1999 |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering