Lithographically-induced self-assembly of periodic micro-pillar arrays in a single homopolymer film

Stephen Y. Chou, Lei Zhuang, Paru Deshpande, Lei Chen, Xiaoyun Sun

Research output: Contribution to journalConference articlepeer-review

4 Scopus citations

Abstract

Lilthographically-induced self-assembly (LISA) is a newly discovered pattern formation pheonomenon occurring at micrometer or submicrometer length scale. In LISA, a plate (called mask), placed a distance above a thin single-homopolymer film heated about Tg, causes the polymer film, initially flat on another plate, to self-assemble into periodic pillar arrays. Dynamic behavior of LISA showed that the pillars are formed one by one, first under the corners of a mask pattern, then the edges, and later the center. Investigation indicated that LISA is triggered by an attractive force between the mask and the polymer, and it is related to the interplay of electrodynamics, fluid-hydrodynamics, and polymer-chemistry at the nanometer scale.

Original languageEnglish (US)
Number of pages1
JournalAmerican Chemical Society, Polymer Preprints, Division of Polymer Chemistry
Volume41
Issue number1
StatePublished - Mar 1 2000
EventThe San Francisco Meeting - San Francisco, CA, USA
Duration: Mar 26 2000Mar 31 2000

All Science Journal Classification (ASJC) codes

  • Polymers and Plastics

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