Abstract
Ordered lithographically induced self-assembly (LISA) pillar arrays were formed in polymethyl(methacrylate) (PMMA) when an oil layer is present between the PMMA surface and mask. The oil modifies the interface between energies leading to disordered patterns with nonuniform size. This effect is only overcome at higher temperatures at which point ordered LISA pillar arrays can be formed.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 2741-2744 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 19 |
| Issue number | 6 |
| DOIs | |
| State | Published - Nov 2001 |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering
Fingerprint
Dive into the research topics of 'Lithographically induced self-assembly of microstructures with a liquid-filled gap between the mask and polymer surface'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver