Ordered lithographically induced self-assembly (LISA) pillar arrays were formed in polymethyl(methacrylate) (PMMA) when an oil layer is present between the PMMA surface and mask. The oil modifies the interface between energies leading to disordered patterns with nonuniform size. This effect is only overcome at higher temperatures at which point ordered LISA pillar arrays can be formed.
|Number of pages
|Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
|Published - Nov 2001
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering