Lithographically induced self-assembly of microstructures with a liquid-filled gap between the mask and polymer surface

Paru Deshpande, Stephen Y. Chou

Research output: Contribution to journalArticle

20 Scopus citations

Abstract

Ordered lithographically induced self-assembly (LISA) pillar arrays were formed in polymethyl(methacrylate) (PMMA) when an oil layer is present between the PMMA surface and mask. The oil modifies the interface between energies leading to disordered patterns with nonuniform size. This effect is only overcome at higher temperatures at which point ordered LISA pillar arrays can be formed.

Original languageEnglish (US)
Pages (from-to)2741-2744
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume19
Issue number6
DOIs
StatePublished - Nov 1 2001

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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