Linear-Translational Multi-Target Manipulator with Adjustable Temperature Control for Thin Film Deposition

Hyuncheol Jeong (Inventor), Craig Arnold (Inventor), Rodney Priestley (Inventor)

Research output: Innovation

Original language	English
State	Published - Jul 23 2013

Keywords

@misc{2ecfbe3bb5ea4ac4b417790bc1323e17,

title = "Linear-Translational Multi-Target Manipulator with Adjustable Temperature Control for Thin Film Deposition",

keywords = "materials, metamaterials, process optimization",

author = "Hyuncheol Jeong and Craig Arnold and Rodney Priestley",

year = "2013",

month = jul,

day = "23",

language = "English",

type = "Patent",

}