Layered nanoassembly of three-dimensional structures

A. A.G. Requicha, S. Meltzer, R. Resch, D. Lewis, Bruce E. Koel, M. E. Thompson

Research output: Contribution to journalArticlepeer-review

12 Scopus citations


NEMS (nanoelectromechanical systems) loom beyond the MEMS horizon as the new frontier in miniaturization. Nanorobots and other NEMS are expected to find revolutionary applications in science, engineering and everyday life. Until now, nanostructures have been built primarily in two dimensions, because of the difficulties of three-dimensional (3-D) fabrication. This paper describes a promising approach to the construction of 3-D nanostructures by working in successive layers, much like the rapid prototyping techniques used in the macroscopic world. Each object nanolayer is built by nanomanipulation, or possibly by programmed selfassembly, and then surrounded by a sacrificial layer that planarizes the sample and serves as a substrate for the deposition of the next object nanolayer. Initial experimental results which show that the approach is feasible are presented.

Original languageEnglish (US)
Pages (from-to)3408-3411
Number of pages4
JournalProceedings - IEEE International Conference on Robotics and Automation
StatePublished - 2001

All Science Journal Classification (ASJC) codes

  • Software
  • Control and Systems Engineering
  • Artificial Intelligence
  • Electrical and Electronic Engineering


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