Layered nanoassembly of three-dimensional structures

A. A.G. Requicha; S. Meltzer; R. Resch; D. Lewis; Bruce E. Koel; M. E. Thompson

doi:10.1109/ROBOT.2001.933144

Layered nanoassembly of three-dimensional structures

A. A.G. Requicha, S. Meltzer, R. Resch, D. Lewis, Bruce E. Koel, M. E. Thompson

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

NEMS (nanoelectromechanical systems) loom beyond the MEMS horizon as the new frontier in miniaturization. Nanorobots and other NEMS are expected to find revolutionary applications in science, engineering and everyday life. Until now, nanostructures have been built primarily in two dimensions, because of the difficulties of three-dimensional (3-D) fabrication. This paper describes a promising approach to the construction of 3-D nanostructures by working in successive layers, much like the rapid prototyping techniques used in the macroscopic world. Each object nanolayer is built by nanomanipulation, or possibly by programmed selfassembly, and then surrounded by a sacrificial layer that planarizes the sample and serves as a substrate for the deposition of the next object nanolayer. Initial experimental results which show that the approach is feasible are presented.

Original language	English (US)
Pages (from-to)	3408-3411
Number of pages	4
Journal	Proceedings - IEEE International Conference on Robotics and Automation
Volume	4
DOIs	https://doi.org/10.1109/ROBOT.2001.933144
State	Published - 2001

All Science Journal Classification (ASJC) codes

Software
Control and Systems Engineering
Artificial Intelligence
Electrical and Electronic Engineering

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10.1109/ROBOT.2001.933144

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title = "Layered nanoassembly of three-dimensional structures",

abstract = "NEMS (nanoelectromechanical systems) loom beyond the MEMS horizon as the new frontier in miniaturization. Nanorobots and other NEMS are expected to find revolutionary applications in science, engineering and everyday life. Until now, nanostructures have been built primarily in two dimensions, because of the difficulties of three-dimensional (3-D) fabrication. This paper describes a promising approach to the construction of 3-D nanostructures by working in successive layers, much like the rapid prototyping techniques used in the macroscopic world. Each object nanolayer is built by nanomanipulation, or possibly by programmed selfassembly, and then surrounded by a sacrificial layer that planarizes the sample and serves as a substrate for the deposition of the next object nanolayer. Initial experimental results which show that the approach is feasible are presented.",

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AU - Requicha, A. A.G.

AU - Meltzer, S.

AU - Resch, R.

AU - Lewis, D.

AU - Koel, Bruce E.

AU - Thompson, M. E.

PY - 2001

Y1 - 2001

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AB - NEMS (nanoelectromechanical systems) loom beyond the MEMS horizon as the new frontier in miniaturization. Nanorobots and other NEMS are expected to find revolutionary applications in science, engineering and everyday life. Until now, nanostructures have been built primarily in two dimensions, because of the difficulties of three-dimensional (3-D) fabrication. This paper describes a promising approach to the construction of 3-D nanostructures by working in successive layers, much like the rapid prototyping techniques used in the macroscopic world. Each object nanolayer is built by nanomanipulation, or possibly by programmed selfassembly, and then surrounded by a sacrificial layer that planarizes the sample and serves as a substrate for the deposition of the next object nanolayer. Initial experimental results which show that the approach is feasible are presented.

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Layered nanoassembly of three-dimensional structures

Abstract

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