Abstract
A novel lateral bipolar transistor structure in silicon-on-insulator (SOI) is presented. The structure allows for a minimum geometry base width yet still provides for a metal contact to the entire base region. Fabricated transistors exhibit a base resistance of less than 20 OMEGA .
| Original language | English (US) |
|---|---|
| Pages (from-to) | 104-106 |
| Number of pages | 3 |
| Journal | Electron device letters |
| Volume | EDL-8 |
| Issue number | 3 |
| State | Published - Mar 1987 |
| Externally published | Yes |
All Science Journal Classification (ASJC) codes
- General Engineering
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