Laser-induced Single Step Micro/Nanopatterning

Dieter Bäuerle; Gérard Wysocki; Lars Landström; Johannes Klimstein; Klaus Piglmayer; Johannes Heitz

doi:10.1117/12.541052

Laser-induced Single Step Micro/Nanopatterning

Dieter Bäuerle, Gérard Wysocki, Lars Landström, Johannes Klimstein, Klaus Piglmayer, Johannes Heitz

Research output: Contribution to journal › Conference article › peer-review

8 Scopus citations

Abstract

Recent achievements in laser-induced surface patterning obtained in our group are summarized. Here, we have employed both a SNOM-type setup and two-dimensional lattices of SiO₂ microspheres formed by self-assembly processes. With the SNOM-type setup we have demonstrated nanoscale photochemical and photothermal etching, mainly of Si in Cl₂ atmosphere. With 2D lattices of microspheres a large number of single features can be generated by a single or a few laser shots. Among the examples presented is the surface patterning by ablation, etching, deposition, and surface modification.

Original language	English (US)
Pages (from-to)	8-12
Number of pages	5
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5063
DOIs	https://doi.org/10.1117/12.541052
State	Published - Dec 1 2003
Externally published	Yes
Event	Fourth International Symposium on Laser Precision Microfabrication - Munich, Germany Duration: Jun 21 2003 → Jun 24 2003

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Keywords

Deposition
Etching
LIFT
Laser-processing
Lattices of microspheres
Nano-patterning
Quartz tuning fork
SNOM

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10.1117/12.541052

Cite this

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title = "Laser-induced Single Step Micro/Nanopatterning",

abstract = "Recent achievements in laser-induced surface patterning obtained in our group are summarized. Here, we have employed both a SNOM-type setup and two-dimensional lattices of SiO2 microspheres formed by self-assembly processes. With the SNOM-type setup we have demonstrated nanoscale photochemical and photothermal etching, mainly of Si in Cl2 atmosphere. With 2D lattices of microspheres a large number of single features can be generated by a single or a few laser shots. Among the examples presented is the surface patterning by ablation, etching, deposition, and surface modification.",

keywords = "Deposition, Etching, LIFT, Laser-processing, Lattices of microspheres, Nano-patterning, Quartz tuning fork, SNOM",

author = "Dieter B{\"a}uerle and G{\'e}rard Wysocki and Lars Landstr{\"o}m and Johannes Klimstein and Klaus Piglmayer and Johannes Heitz",

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doi = "10.1117/12.541052",

language = "English (US)",

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journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "Fourth International Symposium on Laser Precision Microfabrication ; Conference date: 21-06-2003 Through 24-06-2003",

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T1 - Laser-induced Single Step Micro/Nanopatterning

AU - Bäuerle, Dieter

AU - Wysocki, Gérard

AU - Landström, Lars

AU - Klimstein, Johannes

AU - Piglmayer, Klaus

AU - Heitz, Johannes

PY - 2003/12/1

Y1 - 2003/12/1

N2 - Recent achievements in laser-induced surface patterning obtained in our group are summarized. Here, we have employed both a SNOM-type setup and two-dimensional lattices of SiO2 microspheres formed by self-assembly processes. With the SNOM-type setup we have demonstrated nanoscale photochemical and photothermal etching, mainly of Si in Cl2 atmosphere. With 2D lattices of microspheres a large number of single features can be generated by a single or a few laser shots. Among the examples presented is the surface patterning by ablation, etching, deposition, and surface modification.

AB - Recent achievements in laser-induced surface patterning obtained in our group are summarized. Here, we have employed both a SNOM-type setup and two-dimensional lattices of SiO2 microspheres formed by self-assembly processes. With the SNOM-type setup we have demonstrated nanoscale photochemical and photothermal etching, mainly of Si in Cl2 atmosphere. With 2D lattices of microspheres a large number of single features can be generated by a single or a few laser shots. Among the examples presented is the surface patterning by ablation, etching, deposition, and surface modification.

KW - Deposition

KW - Etching

KW - LIFT

KW - Laser-processing

KW - Lattices of microspheres

KW - Nano-patterning

KW - Quartz tuning fork

KW - SNOM

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VL - 5063

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JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Fourth International Symposium on Laser Precision Microfabrication

Y2 - 21 June 2003 through 24 June 2003

ER -

Laser-induced Single Step Micro/Nanopatterning

Abstract

All Science Journal Classification (ASJC) codes

Keywords

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