Abstract
Recent achievements in laser-induced surface patterning obtained in our group are summarized. Here, we have employed both a SNOM-type setup and two-dimensional lattices of SiO2 microspheres formed by self-assembly processes. With the SNOM-type setup we have demonstrated nanoscale photochemical and photothermal etching, mainly of Si in Cl2 atmosphere. With 2D lattices of microspheres a large number of single features can be generated by a single or a few laser shots. Among the examples presented is the surface patterning by ablation, etching, deposition, and surface modification.
Original language | English (US) |
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Pages (from-to) | 8-12 |
Number of pages | 5 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 5063 |
DOIs | |
State | Published - Dec 1 2003 |
Externally published | Yes |
Event | Fourth International Symposium on Laser Precision Microfabrication - Munich, Germany Duration: Jun 21 2003 → Jun 24 2003 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
Keywords
- Deposition
- Etching
- LIFT
- Laser-processing
- Lattices of microspheres
- Nano-patterning
- Quartz tuning fork
- SNOM