Laser-induced Single Step Micro/Nanopatterning

Dieter Bäuerle, Gérard Wysocki, Lars Landström, Johannes Klimstein, Klaus Piglmayer, Johannes Heitz

Research output: Contribution to journalConference articlepeer-review

8 Scopus citations


Recent achievements in laser-induced surface patterning obtained in our group are summarized. Here, we have employed both a SNOM-type setup and two-dimensional lattices of SiO2 microspheres formed by self-assembly processes. With the SNOM-type setup we have demonstrated nanoscale photochemical and photothermal etching, mainly of Si in Cl2 atmosphere. With 2D lattices of microspheres a large number of single features can be generated by a single or a few laser shots. Among the examples presented is the surface patterning by ablation, etching, deposition, and surface modification.

Original languageEnglish (US)
Pages (from-to)8-12
Number of pages5
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2003
Externally publishedYes
EventFourth International Symposium on Laser Precision Microfabrication - Munich, Germany
Duration: Jun 21 2003Jun 24 2003

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


  • Deposition
  • Etching
  • LIFT
  • Laser-processing
  • Lattices of microspheres
  • Nano-patterning
  • Quartz tuning fork
  • SNOM


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