Laser-induced nanopatterning, ablation, and plasma spectroscopy in the near-field of an optical fiber tip

Johannes Heitz, Sergey Yakunin, Thomas Stehrer, Gerard Wysocki, Dieter Bäuerle

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations

Abstract

We combine laser processing and the technique of a scanning near-field optical microscope (SNOM) for realization of laser-patterning on a nanoscale, laser ablation near the fiber tip, and micro-analysis of solid surface samples by laserinduced breakdown spectroscopy (LIBS). We describe an universal SNOM-like setup allowing to produce near-field laser patterns by laser heating and laser ablation, laser-induced breakdown spectroscopy, and atomic force microscope (AFM) topography investigation with the same optical fiber tip, which is used as near-field emitter or as probe. With solid Si and Al samples, three laser processing regimes were observed with increasing laser pulse energy: (1) cone formation (only for Si, smallest features with 500 nm width and 100 nm height), (2) formation of small craters (smallest features with 450 nm width and 250 nm depth), and (3) crater formation with a width of more than 2 μmu; m with emission of evaluable plasma emission line spectra.

Original languageEnglish (US)
Title of host publicationXVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
DOIs
StatePublished - Sep 10 2009
EventXVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers - Lisboa, Portugal
Duration: Sep 15 2008Sep 19 2008

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7131
ISSN (Print)0277-786X

Other

OtherXVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
CountryPortugal
CityLisboa
Period9/15/089/19/08

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Keywords

  • LIBS
  • Laser ablation
  • Patterning
  • SNOM

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  • Cite this

    Heitz, J., Yakunin, S., Stehrer, T., Wysocki, G., & Bäuerle, D. (2009). Laser-induced nanopatterning, ablation, and plasma spectroscopy in the near-field of an optical fiber tip. In XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers [71311W] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7131). https://doi.org/10.1117/12.816645