Laser-induced forward transfer direct-write of miniature sensor and microbattery systems

A. Piqué, C. B. Arnold, R. C. Wartena, D. W. Weir, B. Pratap, K. E. Swider-Lyons, R. A. Kant, D. B. Chrisey

Research output: Contribution to journalConference article

7 Scopus citations

Abstract

Direct-Write techniques have the potential to revolutionize the way miniature sensor devices and microbattery systems are designed and fabricated. The Naval Research Laboratory has developed an advanced laser-based forward transfer process for direct writing novel structures and devices comprising of metals, ceramics, polymers and composites under ambient conditions on both ceramic and plastic substrates. Using this forward transfer technique, we have demonstrated the ability to rapidly prototype various types of physical and chemical sensor devices, and microbatteries. The laser forward transfer process is computer controlled which allows the design of the devices to be easily modified and adapted to any specific application. Furthermore, the same process enables the fabrication of complete sensor or power-source systems by incorporating the passive electronic components required for sensor readout or power management. Examples are provided of various types of miniature sensors, and prototype alkaline and Li-ion microbatteries fabricated using this technique.

Original languageEnglish (US)
Pages (from-to)182-188
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4830
DOIs
StatePublished - Dec 1 2002
Externally publishedYes
EventThird International Symposium on Laser Precision Microfabrication - Osaka, Japan
Duration: May 27 2002May 31 2002

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Keywords

  • Direct-Write of microbatteries
  • Direct-Write of sensors
  • Laser transfer
  • MAPLE Direct-Write

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