Laser direct-write of metal patterns for interconnects and antennas

A. Piqué, C. B. Arnold, B. Pratap, R. C.Y. Auyeung, H. S. Kim, D. W. Weir

Research output: Contribution to journalConference article

17 Scopus citations

Abstract

The use of direct-write techniques in the design and manufacture of interconnects and antennas offers some unique advantages for the development of next generation commercial and defense microelectronic systems. Using a laser forward transfer technique, we have demonstrated the ability to rapidly prototype interconnects and various antenna designs. This laser direct-write process is compatible with a broad class of materials such as metals and electronic ceramics and its capable of depositing patterns of any of these materials over non-planar surfaces in a conformal manner. The laser direct-write process is computer controlled so as to allow any given design to be easily modified and adapted to a particular application. To illustrate the potential of this technique, examples of metal lines on laser micromachined polyimide substrates for interconnect applications, are discussed and evaluated. In addition, examples of simple planar and conformal antennas are provided to demonstrate how this technique can influence current and future microelectronic device applications.

Original languageEnglish (US)
Pages (from-to)602-608
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4977
DOIs
StatePublished - Dec 5 2003
Externally publishedYes
EventPROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Photon Processing in Microelectronics and Photonics II - San Jose, CA, United States
Duration: Jan 27 2003Jan 30 2003

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Keywords

  • Conformal antennas
  • Laser direct-write
  • Laser forward transfer
  • Laser micromachining

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