Laser direct-write nanopatterning by near-field multiphoton polymerization using optically trapped microspheres

Yu Cheng Tsai, Karl Heinz Leitz, Romain Fardel, Michael Schmidt, Craig B. Arnold

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We use Gaussian beam to position a microsphere in a polymer precursor environment near a substrate. Pulsed laser is focused by a microsphere to induce multiphoton polymerization in the near-field, enabling additive direct-write nanoscale processing.

Original languageEnglish (US)
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, CLEO_SI 2012
PublisherOptical Society of America (OSA)
PagesCTU1J.5
ISBN (Print)9781557529435
DOIs
StatePublished - 2012
EventCLEO: Science and Innovations, CLEO_SI 2012 - San Jose, CA, United States
Duration: May 6 2012May 11 2012

Publication series

NameCLEO: Science and Innovations, CLEO_SI 2012

Other

OtherCLEO: Science and Innovations, CLEO_SI 2012
CountryUnited States
CitySan Jose, CA
Period5/6/125/11/12

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Tsai, Y. C., Leitz, K. H., Fardel, R., Schmidt, M., & Arnold, C. B. (2012). Laser direct-write nanopatterning by near-field multiphoton polymerization using optically trapped microspheres. In CLEO: Science and Innovations, CLEO_SI 2012 (pp. CTU1J.5). (CLEO: Science and Innovations, CLEO_SI 2012). Optical Society of America (OSA). https://doi.org/10.1364/cleo_si.2012.ctu1j.5