Large-area, ordered hexagonal arrays of nanoscale holes or dots from block copolymer templates

Keyphrases

• Hexagonal Array 100%
• Block Copolymer Template 100%
• Nanoscale Holes 100%
• Pattern Transfer 50%
• Grain Boundary 50%
• Diblock Copolymer 50%
• Silicon Wafer 50%
• Orientational Order 50%
• Dot Array 50%
• Hole Array 50%
• Nanodomains 50%
• Etching Process 50%
• Block Copolymer Films 50%
• Sphere-forming 50%
• Nanoscale Metals 50%

Material Science

• Block Copolymer 100%
• Film 50%
• Copolymer 50%
• Silicon Wafer 50%
• Grain Boundary 50%