Large area high density quantized magnetic disks fabricated using nanoimprint lithography

Wei Wu; Bo Cui; Xiao Yun Sun; Wei Zhang; Lei Zhuang; Linshu Kong; Stephen Y. Chou

doi:10.1116/1.590417

Large area high density quantized magnetic disks fabricated using nanoimprint lithography

Wei Wu, Bo Cui, Xiao Yun Sun, Wei Zhang, Lei Zhuang, Linshu Kong, Stephen Y. Chou

Research output: Contribution to journal › Article › peer-review

185 Scopus citations

Abstract

A new low-cost, high throughput method was developed for fabricating large area quantized magnetic disks (QMDs) using nanoimprint lithography (NIL), electroplating, and chemical mechanical polishing. Perpendicular QMDs with a density of 18 Gbit/in.² and good uniformity over an area of 4 cm×4 cm (total 45 Gbit) have been achieved, as well as longitudinal QMDs of 30 Gbit/in.² The NIL molds for the perpendicular QMDs were fabricated using double NIL with a grating mold. The magnetic properties of both types of QMDs were studied by magnetic force microscopy.

Original language	English (US)
Pages (from-to)	3825-3829
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	16
Issue number	6
DOIs	https://doi.org/10.1116/1.590417
State	Published - 1998

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Electrical and Electronic Engineering

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abstract = "A new low-cost, high throughput method was developed for fabricating large area quantized magnetic disks (QMDs) using nanoimprint lithography (NIL), electroplating, and chemical mechanical polishing. Perpendicular QMDs with a density of 18 Gbit/in.2 and good uniformity over an area of 4 cm×4 cm (total 45 Gbit) have been achieved, as well as longitudinal QMDs of 30 Gbit/in.2 The NIL molds for the perpendicular QMDs were fabricated using double NIL with a grating mold. The magnetic properties of both types of QMDs were studied by magnetic force microscopy.",

author = "Wei Wu and Bo Cui and Sun, {Xiao Yun} and Wei Zhang and Lei Zhuang and Linshu Kong and Chou, {Stephen Y.}",

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T1 - Large area high density quantized magnetic disks fabricated using nanoimprint lithography

AU - Wu, Wei

AU - Cui, Bo

AU - Sun, Xiao Yun

AU - Zhang, Wei

AU - Zhuang, Lei

AU - Kong, Linshu

AU - Chou, Stephen Y.

PY - 1998

Y1 - 1998

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AB - A new low-cost, high throughput method was developed for fabricating large area quantized magnetic disks (QMDs) using nanoimprint lithography (NIL), electroplating, and chemical mechanical polishing. Perpendicular QMDs with a density of 18 Gbit/in.2 and good uniformity over an area of 4 cm×4 cm (total 45 Gbit) have been achieved, as well as longitudinal QMDs of 30 Gbit/in.2 The NIL molds for the perpendicular QMDs were fabricated using double NIL with a grating mold. The magnetic properties of both types of QMDs were studied by magnetic force microscopy.

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Large area high density quantized magnetic disks fabricated using nanoimprint lithography

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