Large area high density quantized magnetic disks fabricated using nanoimprint lithography

Wei Wu, Bo Cui, Xiao Yun Sun, Wei Zhang, Lei Zhuang, Linshu Kong, Stephen Y. Chou

Research output: Contribution to journalArticle

183 Scopus citations

Abstract

A new low-cost, high throughput method was developed for fabricating large area quantized magnetic disks (QMDs) using nanoimprint lithography (NIL), electroplating, and chemical mechanical polishing. Perpendicular QMDs with a density of 18 Gbit/in.2 and good uniformity over an area of 4 cm×4 cm (total 45 Gbit) have been achieved, as well as longitudinal QMDs of 30 Gbit/in.2 The NIL molds for the perpendicular QMDs were fabricated using double NIL with a grating mold. The magnetic properties of both types of QMDs were studied by magnetic force microscopy.

Original languageEnglish (US)
Pages (from-to)3825-3829
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume16
Issue number6
DOIs
StatePublished - 1998

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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