Kinetic simulations of plasma dynamics in the EUV sources

Kirill V. Lezhnin, Samuel Totorica, Abdullah Hyder, John Sheil, Oscar O. Versolato, Ahmed Diallo, William Fox

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Fast ion debris generated in laser-tin droplet interaction can pose severe threats to the lifetime of the collector mirror in EUV sources. In the present work, we conduct one-dimensional fully kinetic Particle-In-Cell simulations using PSC code that is capable of capturing fast ion debris formation. We discuss the progress in the implementation of physics modules for the PSC code that is required to reproduce the dynamics of the laser-produced plasmas in EUV sources. We demonstrate decent agreement between our kinetic simulations and radiation hydrodynamics simulations in terms of macroscopic plasma parameters. We also discuss the role of the kinetic effects in EUV and next-generation BEUV sources.

Original languageEnglish (US)
Title of host publicationOptical and EUV Nanolithography XXXVI
EditorsAnna Lio
PublisherSPIE
ISBN (Electronic)9781510660953
DOIs
StatePublished - 2023
EventOptical and EUV Nanolithography XXXVI 2023 - San Jose, United States
Duration: Feb 27 2023Mar 2 2023

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume12494
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceOptical and EUV Nanolithography XXXVI 2023
Country/TerritoryUnited States
CitySan Jose
Period2/27/233/2/23

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Keywords

  • EUV source
  • expanding plasma dynamics
  • kinetic plasma physics
  • particle-in-cell simulations

Fingerprint

Dive into the research topics of 'Kinetic simulations of plasma dynamics in the EUV sources'. Together they form a unique fingerprint.

Cite this