Ion-induced damage and annealing of silicon. Molecular dynamics simulations

David Humbird; David B. Graves

doi:10.1351/pac200274030419

Ion-induced damage and annealing of silicon. Molecular dynamics simulations

David Humbird, David B. Graves

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Abstract

A study of the interactions of energetic argon ions with silicon surfaces using molecular dynamics simulations is reported. A dynamic balance between ion-induced damage and recrystallization of the surface is detected. By manipulating ion energy, argon ions are able to both create disordered regions near the surface, and recrystallize these disordered regions.

Original language	English (US)
Pages (from-to)	419-422
Number of pages	4
Journal	Pure and Applied Chemistry
Volume	74
Issue number	3
DOIs	https://doi.org/10.1351/pac200274030419
State	Published - 2002
Externally published	Yes

All Science Journal Classification (ASJC) codes

General Chemistry
General Chemical Engineering

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10.1351/pac200274030419

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abstract = "A study of the interactions of energetic argon ions with silicon surfaces using molecular dynamics simulations is reported. A dynamic balance between ion-induced damage and recrystallization of the surface is detected. By manipulating ion energy, argon ions are able to both create disordered regions near the surface, and recrystallize these disordered regions.",

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AU - Humbird, David

AU - Graves, David B.

PY - 2002

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AB - A study of the interactions of energetic argon ions with silicon surfaces using molecular dynamics simulations is reported. A dynamic balance between ion-induced damage and recrystallization of the surface is detected. By manipulating ion energy, argon ions are able to both create disordered regions near the surface, and recrystallize these disordered regions.

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DO - 10.1351/pac200274030419

M3 - Article

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SP - 419

EP - 422

JO - Pure and Applied Chemistry

JF - Pure and Applied Chemistry

IS - 3

ER -

Ion-induced damage and annealing of silicon. Molecular dynamics simulations

Abstract

All Science Journal Classification (ASJC) codes

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