Investigation of diblock copolymer thin film morphology for nanolithography

Miri Park, Christopher Harrison, Paul M. Chaikin, Richard A. Register, Douglas Adamson, Nan Yao

Research output: Contribution to journalConference article

11 Scopus citations

Abstract

The morphologies and ordering in thin polystyrene-polybutadiene (PS-PB) diblock copolymer films are studied on bare silicon and silicon nitride substrates, and also on polymethylmethacrylate (PMMA) coated substrates. The PS-PB copolymers are synthesized to form, in bulk, PB cylinders or spheres in a PS matrix. In thin films, prepared by spin-coating, it is observed that the morphology and ordering of the microdomains are affected by strong wetting constraints and a reduced chain mobility on the substrate. The thinnest self-assembled layer of the copolymer films shows no in-plane microphase separation on both types of substrates. In the case of spherical PS-PB diblock copolymer films, it is observed thatthe ordering of the microdomains is improved in the films on the PMMA substrates, compared to those on the bare substrates. A successful transfer of the microdomain patterns to silicon nitride substrates by a reactive ion etching technique is also demonstrated.

Original languageEnglish (US)
Pages (from-to)179-184
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume461
StatePublished - Jan 1 1997
EventProceedings of the 1996 MRS Fall Meeting - Boston, MA, USA
Duration: Dec 2 1996Dec 4 1996

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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