Inverted-Rib Chalcogenide Waveguides by Solution Process

Yunlai Zha, Pao Tai Lin, Lionel Kimerling, Anu Agarwal, Craig B. Arnold

Research output: Contribution to journalArticlepeer-review

26 Scopus citations


(Graph Presented) This paper studies the fabrication and characterization of solution-processed chalcogenide waveguides by a microtrench filling method. In this process, channels are etched on substrates and backfilled with solution-dissolved arsenic sulfide before being annealed. The waveguides are homogeneous in elemental composition and have good mode confinement. Both simulation and experimental measurements confirm a dominant fundamental mode covering 2.5-2.8 μm. We measure an optical loss of 1.87 dB/cm, which to our knowledge is the lowest among solution-processed waveguides.

Original languageEnglish (US)
Pages (from-to)153-157
Number of pages5
JournalACS Photonics
Issue number3
StatePublished - Mar 19 2014

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Biotechnology
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering


  • arsenic sulfide
  • chalcogenides
  • glass
  • microtrench filling
  • solution-process


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