Interactions of energetic clusters with surfaces at glancing incidence

Che Chen Chang, Paul H. Kydd, Steven L. Bernasek, Herschel A. Rabitz

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2 Scopus citations


Phenomena associated with impact of ions, atoms and clusters on surfaces at angles relative to the surface normal near 90° (glancing incidence) have received little attention relative to the massive literature on such collisions at angles up to about 60°. Trajectory calculations indicate that under certain conditions incident cluster fragments are trapped by the surface, and exhibit two-dimensional gas-like behavior, travelling parallel to the surface. This behavior has been observed previously for low energy atoms incident on the surface [J. Vac. Sci. Technol. B 5 (1987) 1393]. This paper is concerned with clusters making glancing incidence collisions with the surface at energies up to 10 keV. A channeling effect, in which the energetic cluster fragments with two-dimensional gas-like behavior are steered by the surface atomic topography with momentum aligned with the close-packed substrate atomic chains is also observed. In addition, coalescence to larger clusters has been observed in these calculations for clusters of atoms with selected binding energies as they move over the crystal surface at high velocity. This work was undertaken to determine whether it would be possible to create a beam of massive particles with high energy and high velocity by coalescing beams of ions. It appears that under certain circumstances this can be done.

Original languageEnglish (US)
Pages (from-to)333-342
Number of pages10
JournalSurface Science
Issue number3
StatePublished - Dec 2 1990

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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