Interactions between plasma and block copolymers used in directed self-assembly patterning
- Stephen Sirard
- , Laurent Azarnouche
- , Emir Gurer
- , William Durand
- , Michael Maher
- , Kazunori Mori
- , Gregory Blachut
- , Dustin Janes
- , Yusuke Asano
- , Yasunobu Someya
- , Diane Hymes
- , David Graves
- , Christopher J. Ellison
- , C. Grant Willson
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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