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Interaction of vacuum ultraviolet light with a low-k organosilicate glass film in the presence of NH3
Swayambhu Behera, Joe Lee, Sneha Gaddam, Sundari Pokharel, Justin Wilks, Frank Pasquale, David Graves, Jeffry A. Kelber
Research output: Contribution to journal › Article › peer-review
17
Scopus
citations