Integrated amorphous and polycrystalline silicon TFTs with a single silicon layer

Engineering & Materials Science

• Amorphous silicon 100%
• Glass 29%
• Hydrogen 58%
• Hydrogenation 46%
• Lasers 27%
• Plasmas 33%
• Polysilicon 84%
• Silicon 57%
• Substrates 25%
• Temperature 14%

Chemical Compounds

• Ambient Reaction Temperature 20%
• Amorphous Material 25%
• Amorphous Silicon 99%
• Compound Mobility 27%
• Field Effect 36%
• Glass Substrate 36%
• Hydrogen 18%
• Liquid Film 17%
• Plasma 22%
• Polycrystalline Solid 65%

Physics & Astronomy

• amorphous silicon 67%
• glass 21%
• hydrogen plasma 41%
• hydrogenation 40%
• lasers 16%
• room temperature 20%
• silicon 39%