Influence of modeling and simulation on the maturation of plasma technology: Feature evolution and reactor design

David B. Graves, Mark J. Kushner

Research output: Contribution to journalArticlepeer-review

34 Scopus citations

Abstract

The influence of modeling and simulation (MS) on the maturation of plasma technology was discussed. It was observed that the maturation of plasma equipment and feature scale MS resulted from a better understanding of the underlying physics and chemistry, from innovation in numerical algorithms and in the development of a more comprehensive fundamental databases. A summary of the historical development, present status, and future potential of MS for feature evolution and plasma reactor design was presented.

Original languageEnglish (US)
Pages (from-to)S152-S156
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume21
Issue number5
DOIs
StatePublished - Sep 2003
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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