Abstract
The influence of modeling and simulation (MS) on the maturation of plasma technology was discussed. It was observed that the maturation of plasma equipment and feature scale MS resulted from a better understanding of the underlying physics and chemistry, from innovation in numerical algorithms and in the development of a more comprehensive fundamental databases. A summary of the historical development, present status, and future potential of MS for feature evolution and plasma reactor design was presented.
| Original language | English (US) |
|---|---|
| Pages (from-to) | S152-S156 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 21 |
| Issue number | 5 |
| DOIs | |
| State | Published - Sep 2003 |
| Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films