The influence of modeling and simulation (MS) on the maturation of plasma technology was discussed. It was observed that the maturation of plasma equipment and feature scale MS resulted from a better understanding of the underlying physics and chemistry, from innovation in numerical algorithms and in the development of a more comprehensive fundamental databases. A summary of the historical development, present status, and future potential of MS for feature evolution and plasma reactor design was presented.
|Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
|Published - Sep 2003
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films