Inductively coupled plasmas in oxygen: Modeling and experiment

Mark W. Kiehlbauch, David B. Graves

Research output: Contribution to journalArticlepeer-review

55 Scopus citations

Abstract

Results from a 2D simulation of an inductively coupled plasma (ICP) in pure oxygen gas are compared to previously unpublished experimental measurements and the trends with pressure and power are considered. Kinetic and neutral transport processes are discussed. Focus is on the role of surfaces, neutral heating and metastables in the formation of gradients in oxygen ICP, and in the effect of these gradients on plasma characteristics.

Original languageEnglish (US)
Pages (from-to)660-670
Number of pages11
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume21
Issue number3
DOIs
StatePublished - May 2003
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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