Abstract
Results from a 2D simulation of an inductively coupled plasma (ICP) in pure oxygen gas are compared to previously unpublished experimental measurements and the trends with pressure and power are considered. Kinetic and neutral transport processes are discussed. Focus is on the role of surfaces, neutral heating and metastables in the formation of gradients in oxygen ICP, and in the effect of these gradients on plasma characteristics.
Original language | English (US) |
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Pages (from-to) | 660-670 |
Number of pages | 11 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 21 |
Issue number | 3 |
DOIs | |
State | Published - May 2003 |
Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films