@inproceedings{88b74dd13f57426db679d4465ef3430a,
title = "IMPROVED CRYSTAL PERFECTION IN ZONE-RECRYSTALLIZED Si FILMS ON SiO//2.",
abstract = "The authors review recent results of graphite strip heater Si-on-insulator (SOI) research covered are Recrystallization of SOI films on 100 mm wafers, a model of subboundary pattern formation in SOI films, low defect density SOI films using ultra slow scanning of the melt zone, and low defect density SOI films using patterned openings in the cap oxide overlayer.",
author = "Loren Pfeiffer and West, {K. W.} and Scott Paine and Joy, {D. C.}",
year = "1985",
language = "English (US)",
isbn = "0931837006",
series = "Materials Research Society Symposia Proceedings",
publisher = "Materials Research Soc",
pages = "583--592",
editor = "D.K. Biegelsen and Shank, {Charles V.}",
booktitle = "Materials Research Society Symposia Proceedings",
}