Imprint lithography with sub-10 nm feature size and high throughput

Engineering & Materials Science

• Nanoimprint lithography 100%
• Lithography 70%
• Throughput 44%
• Semiconductor quantum wires 25%
• Photodetectors 16%
• Transistors 10%
• Silicon 10%
• Costs 4%

Physics & Astronomy

• lithography 53%
• quantum wires 14%
• photometers 11%
• transistors 10%
• quantum dots 9%
• rings 8%
• silicon 6%

Chemical Compounds

• Quantum Dot 11%
• Surface 4%