Imprint lithography with 25-nanometer resolution

Keyphrases

• Anisotropic Etching 33%
• Commercially Viable 33%
• Compression Molding 33%
• Contrast Patterns 33%
• Metal Pattern 33%
• Nanometer Resolution 100%
• Nanometer Structure 33%
• Resist Film 33%
• Resist Thickness 33%
• Thin Resist 33%
• Vertical Sidewall 33%

Engineering

• Compression Molding 20%
• Imprint Lithography 100%

Material Science

• Anisotropic Etching 33%
• Compression Molding 33%