Imprint lithography with 25-nanometer resolution

Keyphrases

• Imprint Lithography 100%
• Nanometer Resolution 100%
• Further Development 33%
• Integrated Circuits 33%
• Nanodevices 33%
• High-throughput 33%
• Lift-off 33%
• Compression Molding 33%
• Nanometer Structure 33%
• Vertical Sidewall 33%
• Contrast Patterns 33%
• Commercially Viable 33%
• Resist Film 33%
• Anisotropic Etching 33%
• Metal Pattern 33%
• Resist Thickness 33%
• Thin Resist 33%

Engineering

• Nanometre 100%
• Imprint Lithography 100%
• Side Wall 20%
• Anisotropic 20%
• Feature Size 20%
• Compression Molding 20%
• Integrated Circuit 20%

Material Science

• Lithography 100%
• Film 33%
• Electronic Circuit 33%
• Nanodevice 33%
• Anisotropic Etching 33%
• Compression Molding 33%