Imprint lithography with 25-nanometer resolution

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom

Research output: Contribution to journalArticlepeer-review

2357 Scopus citations

Fingerprint

Dive into the research topics of 'Imprint lithography with 25-nanometer resolution'. Together they form a unique fingerprint.

Keyphrases

Engineering

Material Science