Hydrogenation and surface density changes in hydrocarbon films during erosion using Ar/H₂ plasmas

Keyphrases

• Surface Density 100%
• Hydrogenation 100%
• Density Change 100%
• Ion Energy 100%
• H2 Plasma 100%
• Hydrocarbon Films 100%
• Steady State 66%
• Ar Plasma 66%
• Modified Surface Layer 66%
• Transport of Ions in Matter 66%
• Molecular Dynamics Simulation 33%
• Molecular Dynamics 33%
• Low Pressure 33%
• H Atoms 33%
• Atomic Force Microscopy 33%
• X-ray Photoelectron Spectroscopy 33%
• Near-surface Region 33%
• Plasma Exposure 33%
• Energy Transition 33%
• Surface Evolution 33%
• Film Surface 33%
• Increased Yield 33%
• Ar Ions 33%
• Molecular Transport 33%
• Surface Erosion 33%
• Ar-Ar 33%
• Ion Composition 33%
• Depletion Layer 33%
• Chemical Sputtering 33%
• Dynamic Transport 33%
• Surface Changes 33%
• Surface Densification 33%
• Physical Sputtering 33%
• Ar-H2 33%
• Modified Layer 33%
• In Situ Ellipsometry 33%
• Multilayer Model 33%
• Long-term Loss 33%

Physics

• Steady State 100%
• Molecular Dynamics 100%
• Surface Layers 100%
• Transportation 100%
• X Ray Spectroscopy 50%
• Atomic Force Microscopy 50%
• Ellipsometry 50%
• X Ray Photoemission Spectroscopy 50%

Material Science

• Film 100%
• Density 100%
• Hydrogenation 100%
• Photoemission Spectroscopy 16%
• Atomic Force Microscopy 16%