High temperature polycrystalline silicon thin film transistor on steel substrates

Engineering & Materials Science

• Thin film transistors 100%
• Polysilicon 90%
• Crystallization 85%
• Substrates 55%
• Steel 45%
• Transistors 44%
• Plasma enhanced chemical vapor deposition 37%
• Amorphous silicon 35%
• Drain current 33%
• Temperature 31%
• Metal foil 28%
• Annealing 25%
• Contamination 25%
• Furnaces 23%
• Glass 20%

Physics & Astronomy

• transistors 62%
• crystallization 60%
• steels 57%
• silicon 42%
• thin films 40%
• silicon transistors 36%
• silicon films 27%
• amorphous silicon 24%
• furnaces 23%
• contamination 23%
• foils 22%
• annealing 15%
• temperature 15%
• glass 15%

Chemical Compounds

• Polycrystalline Solid 69%
• Crystallization 54%
• Drain Current 40%
• Amorphous Silicon 35%
• Time 28%
• Foil 26%
• Glass Substrate 25%
• Annealing 20%
• Strain 18%
• Liquid Film 12%