High-speed GaAs metal-semiconductor-metal photodetcetors with sub-0.1 μm finger-width and finger-spacing

Keyphrases

• Gallium Arsenide 100%
• Metal-semiconductor-metal 100%
• Finger Spacing 100%
• Finger Length 100%
• Monte Carlo Simulation 33%
• High Sensitivity 33%
• Response Time 33%
• Cut-off Frequency 33%
• Metal-semiconductor-metal Photodetector 33%
• Sub-100 Nm 33%
• Low Dark Current 33%
• Current Sensitivity 33%
• Fabricated Metal 33%
• Ment 33%
• Photodetector 33%

Engineering

• Gallium Arsenide 100%
• Response Time 50%
• Cutoff Frequency 50%
• Photodetector 50%
• Photometer 50%

Material Science

• Gallium Arsenide 100%
• Molecular Beam Epitaxy 50%
• Photosensor 50%