High-speed GaAs metal-semiconductor-metal photodetcetors with sub-0.1 μm finger-width and finger-spacing

Stephen Y. Chou, Y. Liu, P. B. Fischer

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations


We have fabricated metal-semiconductor-metal photo-detectors with sub-100-nm finger spacing and finger width on MBE-grown GaAs, which are, to our knowledge, the smallest ever reported. DC measure-ment shows that they have low dark current and high sensitivity. Monte-Carlo simulations demonstrate that the response time of the photodetectors for a 30 nm finger spacing can be as short as 0.4 ps, and the cut-off frequency can be over 1 THz.

Original languageEnglish (US)
Pages (from-to)243-247
Number of pages5
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - Sep 1 1991
Externally publishedYes
EventOptical Technology for Signal Processing Systems 1991 - Orlando, United States
Duration: Apr 1 1991 → …

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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