Abstract
Nanotransfer printing is a highly versatile contact printing technique capable of nanoscale resolution over large areas. This paper describes its use with a compound semiconductor substrate. With a 1,8-octanedithiol monolayer, gold patterns are transferred from elastomeric stamps onto different cryatallographic planes of GaAs. Pattern transfer is fast (<15 s) and occurs at ambient conditions.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 2853-2856 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 20 |
| Issue number | 6 |
| DOIs | |
| State | Published - Nov 2002 |
| Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering