High-resolution transfer printing on GaAs surfaces using alkane dithiol monolayers

Yueh Lin Loo, Julia W.P. Hsu, Robert L. Willett, Kirk W. Baldwin, Ken W. West, John A. Rogers

Research output: Contribution to journalArticlepeer-review

83 Scopus citations

Abstract

Nanotransfer printing is a highly versatile contact printing technique capable of nanoscale resolution over large areas. This paper describes its use with a compound semiconductor substrate. With a 1,8-octanedithiol monolayer, gold patterns are transferred from elastomeric stamps onto different cryatallographic planes of GaAs. Pattern transfer is fast (<15 s) and occurs at ambient conditions.

Original languageEnglish (US)
Pages (from-to)2853-2856
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume20
Issue number6
DOIs
StatePublished - Nov 1 2002
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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