High quality mechanical and optical properties of commercial silicon nitride membranes

B. M. Zwickl, W. E. Shanks, A. M. Jayich, C. Yang, A. C.Bleszynski Jayich, J. D. Thompson, J. G.E. Harris

Research output: Contribution to journalArticlepeer-review

172 Scopus citations

Fingerprint

Dive into the research topics of 'High quality mechanical and optical properties of commercial silicon nitride membranes'. Together they form a unique fingerprint.

Material Science

Physics

Keyphrases