High quality mechanical and optical properties of commercial silicon nitride membranes

B. M. Zwickl, W. E. Shanks, A. M. Jayich, C. Yang, A. C.Bleszynski Jayich, J. D. Thompson, J. G.E. Harris

Research output: Contribution to journalArticlepeer-review

130 Scopus citations

Fingerprint Dive into the research topics of 'High quality mechanical and optical properties of commercial silicon nitride membranes'. Together they form a unique fingerprint.

Physics & Astronomy