High quality mechanical and optical properties of commercial silicon nitride membranes

B. M. Zwickl; W. E. Shanks; A. M. Jayich; C. Yang; A. C.Bleszynski Jayich; J. D. Thompson; J. G.E. Harris

doi:10.1063/1.2884191

High quality mechanical and optical properties of commercial silicon nitride membranes

B. M. Zwickl
, W. E. Shanks
, A. M. Jayich
, C. Yang
, A. C.Bleszynski Jayich
, J. D. Thompson
, J. G.E. Harris

Research output: Contribution to journal › Article › peer-review

181 Scopus citations

Abstract

We have measured the optical and mechanical loss of commercial silicon nitride membranes. We find that 50 nm thick, 1 mm2 membranes have mechanical Q > 10⁶ at 293 K, and Q > 10⁷ at 300 mK, well above what has been observed in devices with comparable dimensions. The near-IR optical loss at 293 K is less than 2× 10-4. This combination of properties make these membranes attractive candidates for studying quantum effects in optomechanical systems.

Original language	English (US)
Article number	103125
Journal	Applied Physics Letters
Volume	92
Issue number	10
DOIs	https://doi.org/10.1063/1.2884191
State	Published - 2008
Externally published	Yes

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.2884191

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@article{2d52bf8d585d4f2d8f19e3edbdff8a67,

title = "High quality mechanical and optical properties of commercial silicon nitride membranes",

abstract = "We have measured the optical and mechanical loss of commercial silicon nitride membranes. We find that 50 nm thick, 1 mm2 membranes have mechanical Q > 106 at 293 K, and Q > 107 at 300 mK, well above what has been observed in devices with comparable dimensions. The near-IR optical loss at 293 K is less than 2× 10-4. This combination of properties make these membranes attractive candidates for studying quantum effects in optomechanical systems.",

author = "Zwickl, \{B. M.\} and Shanks, \{W. E.\} and Jayich, \{A. M.\} and C. Yang and Jayich, \{A. C.Bleszynski\} and Thompson, \{J. D.\} and Harris, \{J. G.E.\}",

note = "Funding Information: This work was supported by NSF Grant Nos. 0555824 and 0653377 and the Yale Institute for Nanoscience and Quantum Engineering. B.M.Z. acknowledges the support of an NSF Graduate Research Fellowship and J.G.E.H. acknowledges support from an Alfred P. Sloan Foundation fellowship.",

year = "2008",

doi = "10.1063/1.2884191",

language = "English (US)",

volume = "92",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "10",

}

TY - JOUR

T1 - High quality mechanical and optical properties of commercial silicon nitride membranes

AU - Zwickl, B. M.

AU - Shanks, W. E.

AU - Jayich, A. M.

AU - Yang, C.

AU - Jayich, A. C.Bleszynski

AU - Thompson, J. D.

AU - Harris, J. G.E.

N1 - Funding Information: This work was supported by NSF Grant Nos. 0555824 and 0653377 and the Yale Institute for Nanoscience and Quantum Engineering. B.M.Z. acknowledges the support of an NSF Graduate Research Fellowship and J.G.E.H. acknowledges support from an Alfred P. Sloan Foundation fellowship.

PY - 2008

Y1 - 2008

N2 - We have measured the optical and mechanical loss of commercial silicon nitride membranes. We find that 50 nm thick, 1 mm2 membranes have mechanical Q > 106 at 293 K, and Q > 107 at 300 mK, well above what has been observed in devices with comparable dimensions. The near-IR optical loss at 293 K is less than 2× 10-4. This combination of properties make these membranes attractive candidates for studying quantum effects in optomechanical systems.

AB - We have measured the optical and mechanical loss of commercial silicon nitride membranes. We find that 50 nm thick, 1 mm2 membranes have mechanical Q > 106 at 293 K, and Q > 107 at 300 mK, well above what has been observed in devices with comparable dimensions. The near-IR optical loss at 293 K is less than 2× 10-4. This combination of properties make these membranes attractive candidates for studying quantum effects in optomechanical systems.

UR - https://www.scopus.com/pages/publications/40849150710

UR - https://www.scopus.com/pages/publications/40849150710#tab=citedBy

U2 - 10.1063/1.2884191

DO - 10.1063/1.2884191

M3 - Article

AN - SCOPUS:40849150710

SN - 0003-6951

VL - 92

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 10

M1 - 103125

ER -

High quality mechanical and optical properties of commercial silicon nitride membranes

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