We have measured the optical and mechanical loss of commercial silicon nitride membranes. We find that 50 nm thick, 1 mm2 membranes have mechanical Q > 106 at 293 K, and Q > 107 at 300 mK, well above what has been observed in devices with comparable dimensions. The near-IR optical loss at 293 K is less than 2× 10-4. This combination of properties make these membranes attractive candidates for studying quantum effects in optomechanical systems.
|Original language||English (US)|
|Journal||Applied Physics Letters|
|State||Published - 2008|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)