High fidelity fabrication of microlens arrays by nanoimprint using conformal mold duplication and low-pressure liquid material curing

Can Peng, Xiaogan Liang, Zengli Fu, Stephen Y. Chou

Research output: Contribution to journalArticle

20 Scopus citations

Abstract

The authors present a novel hyperfidelity fabrication method for microlens arrays. The method consists of the steps of (a) fabrication of a sacrificial master mold of a microlens array in a soft polymer by photolithography and thermal reflow, (b) conformal duplication of a daughter mold of complementary patterns in a hard material by dispensing an UV-curable material liquid on top of the polymer mold, planarizing the liquid with a flat quartz substrate, and curing the material, and (c) fabrication of microlens array using the hard daughter mold and nanoimprinting with an UV-curable lens material. This method has several advantages over conventional fabrication methods of microlens arrays including hyperfidelity, low cost, and high throughput.

Original languageEnglish (US)
Pages (from-to)410-414
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume25
Issue number2
DOIs
StatePublished - Apr 8 2007

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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