High fidelity fabrication of microlens arrays by nanoimprint using conformal mold duplication and low-pressure liquid material curing

Can Peng; Xiaogan Liang; Zengli Fu; Stephen Y. Chou

doi:10.1116/1.2713405

High fidelity fabrication of microlens arrays by nanoimprint using conformal mold duplication and low-pressure liquid material curing

Can Peng, Xiaogan Liang, Zengli Fu, Stephen Y. Chou

Research output: Contribution to journal › Article › peer-review

22 Scopus citations

Abstract

The authors present a novel hyperfidelity fabrication method for microlens arrays. The method consists of the steps of (a) fabrication of a sacrificial master mold of a microlens array in a soft polymer by photolithography and thermal reflow, (b) conformal duplication of a daughter mold of complementary patterns in a hard material by dispensing an UV-curable material liquid on top of the polymer mold, planarizing the liquid with a flat quartz substrate, and curing the material, and (c) fabrication of microlens array using the hard daughter mold and nanoimprinting with an UV-curable lens material. This method has several advantages over conventional fabrication methods of microlens arrays including hyperfidelity, low cost, and high throughput.

Original language	English (US)
Pages (from-to)	410-414
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	25
Issue number	2
DOIs	https://doi.org/10.1116/1.2713405
State	Published - 2007

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.2713405

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title = "High fidelity fabrication of microlens arrays by nanoimprint using conformal mold duplication and low-pressure liquid material curing",

abstract = "The authors present a novel hyperfidelity fabrication method for microlens arrays. The method consists of the steps of (a) fabrication of a sacrificial master mold of a microlens array in a soft polymer by photolithography and thermal reflow, (b) conformal duplication of a daughter mold of complementary patterns in a hard material by dispensing an UV-curable material liquid on top of the polymer mold, planarizing the liquid with a flat quartz substrate, and curing the material, and (c) fabrication of microlens array using the hard daughter mold and nanoimprinting with an UV-curable lens material. This method has several advantages over conventional fabrication methods of microlens arrays including hyperfidelity, low cost, and high throughput.",

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High fidelity fabrication of microlens arrays by nanoimprint using conformal mold duplication and low-pressure liquid material curing. / Peng, Can; Liang, Xiaogan; Fu, Zengli et al.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 25, No. 2, 2007, p. 410-414.

Research output: Contribution to journal › Article › peer-review

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AB - The authors present a novel hyperfidelity fabrication method for microlens arrays. The method consists of the steps of (a) fabrication of a sacrificial master mold of a microlens array in a soft polymer by photolithography and thermal reflow, (b) conformal duplication of a daughter mold of complementary patterns in a hard material by dispensing an UV-curable material liquid on top of the polymer mold, planarizing the liquid with a flat quartz substrate, and curing the material, and (c) fabrication of microlens array using the hard daughter mold and nanoimprinting with an UV-curable lens material. This method has several advantages over conventional fabrication methods of microlens arrays including hyperfidelity, low cost, and high throughput.

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High fidelity fabrication of microlens arrays by nanoimprint using conformal mold duplication and low-pressure liquid material curing

Abstract

All Science Journal Classification (ASJC) codes

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