TY - JOUR
T1 - High fidelity fabrication of microlens arrays by nanoimprint using conformal mold duplication and low-pressure liquid material curing
AU - Peng, Can
AU - Liang, Xiaogan
AU - Fu, Zengli
AU - Chou, Stephen Y.
N1 - Copyright:
Copyright 2011 Elsevier B.V., All rights reserved.
PY - 2007
Y1 - 2007
N2 - The authors present a novel hyperfidelity fabrication method for microlens arrays. The method consists of the steps of (a) fabrication of a sacrificial master mold of a microlens array in a soft polymer by photolithography and thermal reflow, (b) conformal duplication of a daughter mold of complementary patterns in a hard material by dispensing an UV-curable material liquid on top of the polymer mold, planarizing the liquid with a flat quartz substrate, and curing the material, and (c) fabrication of microlens array using the hard daughter mold and nanoimprinting with an UV-curable lens material. This method has several advantages over conventional fabrication methods of microlens arrays including hyperfidelity, low cost, and high throughput.
AB - The authors present a novel hyperfidelity fabrication method for microlens arrays. The method consists of the steps of (a) fabrication of a sacrificial master mold of a microlens array in a soft polymer by photolithography and thermal reflow, (b) conformal duplication of a daughter mold of complementary patterns in a hard material by dispensing an UV-curable material liquid on top of the polymer mold, planarizing the liquid with a flat quartz substrate, and curing the material, and (c) fabrication of microlens array using the hard daughter mold and nanoimprinting with an UV-curable lens material. This method has several advantages over conventional fabrication methods of microlens arrays including hyperfidelity, low cost, and high throughput.
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U2 - 10.1116/1.2713405
DO - 10.1116/1.2713405
M3 - Article
AN - SCOPUS:34047115370
SN - 0734-211X
VL - 25
SP - 410
EP - 414
JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
IS - 2
ER -