High fidelity fabrication of microlens arrays by nanoimprint using conformal mold duplication and low-pressure liquid material curing

Can Peng; Xiaogan Liang; Zengli Fu; Stephen Y. Chou

doi:10.1116/1.2713405

High fidelity fabrication of microlens arrays by nanoimprint using conformal mold duplication and low-pressure liquid material curing

Can Peng, Xiaogan Liang, Zengli Fu, Stephen Y. Chou

Research output: Contribution to journal › Article › peer-review

22 Scopus citations

Abstract

The authors present a novel hyperfidelity fabrication method for microlens arrays. The method consists of the steps of (a) fabrication of a sacrificial master mold of a microlens array in a soft polymer by photolithography and thermal reflow, (b) conformal duplication of a daughter mold of complementary patterns in a hard material by dispensing an UV-curable material liquid on top of the polymer mold, planarizing the liquid with a flat quartz substrate, and curing the material, and (c) fabrication of microlens array using the hard daughter mold and nanoimprinting with an UV-curable lens material. This method has several advantages over conventional fabrication methods of microlens arrays including hyperfidelity, low cost, and high throughput.

Original language	English (US)
Pages (from-to)	410-414
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	25
Issue number	2
DOIs	https://doi.org/10.1116/1.2713405
State	Published - 2007

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.2713405

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@article{1a853ea441ce46eab70d32dbb3d130dc,

title = "High fidelity fabrication of microlens arrays by nanoimprint using conformal mold duplication and low-pressure liquid material curing",

abstract = "The authors present a novel hyperfidelity fabrication method for microlens arrays. The method consists of the steps of (a) fabrication of a sacrificial master mold of a microlens array in a soft polymer by photolithography and thermal reflow, (b) conformal duplication of a daughter mold of complementary patterns in a hard material by dispensing an UV-curable material liquid on top of the polymer mold, planarizing the liquid with a flat quartz substrate, and curing the material, and (c) fabrication of microlens array using the hard daughter mold and nanoimprinting with an UV-curable lens material. This method has several advantages over conventional fabrication methods of microlens arrays including hyperfidelity, low cost, and high throughput.",

author = "Can Peng and Xiaogan Liang and Zengli Fu and Chou, {Stephen Y.}",

year = "2007",

doi = "10.1116/1.2713405",

language = "English (US)",

volume = "25",

pages = "410--414",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "American Institute of Physics",

number = "2",

}

High fidelity fabrication of microlens arrays by nanoimprint using conformal mold duplication and low-pressure liquid material curing. / Peng, Can; Liang, Xiaogan; Fu, Zengli et al.
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 25, No. 2, 2007, p. 410-414.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - High fidelity fabrication of microlens arrays by nanoimprint using conformal mold duplication and low-pressure liquid material curing

AU - Peng, Can

AU - Liang, Xiaogan

AU - Fu, Zengli

AU - Chou, Stephen Y.

PY - 2007

Y1 - 2007

N2 - The authors present a novel hyperfidelity fabrication method for microlens arrays. The method consists of the steps of (a) fabrication of a sacrificial master mold of a microlens array in a soft polymer by photolithography and thermal reflow, (b) conformal duplication of a daughter mold of complementary patterns in a hard material by dispensing an UV-curable material liquid on top of the polymer mold, planarizing the liquid with a flat quartz substrate, and curing the material, and (c) fabrication of microlens array using the hard daughter mold and nanoimprinting with an UV-curable lens material. This method has several advantages over conventional fabrication methods of microlens arrays including hyperfidelity, low cost, and high throughput.

AB - The authors present a novel hyperfidelity fabrication method for microlens arrays. The method consists of the steps of (a) fabrication of a sacrificial master mold of a microlens array in a soft polymer by photolithography and thermal reflow, (b) conformal duplication of a daughter mold of complementary patterns in a hard material by dispensing an UV-curable material liquid on top of the polymer mold, planarizing the liquid with a flat quartz substrate, and curing the material, and (c) fabrication of microlens array using the hard daughter mold and nanoimprinting with an UV-curable lens material. This method has several advantages over conventional fabrication methods of microlens arrays including hyperfidelity, low cost, and high throughput.

UR - http://www.scopus.com/inward/record.url?scp=34047115370&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34047115370&partnerID=8YFLogxK

U2 - 10.1116/1.2713405

DO - 10.1116/1.2713405

M3 - Article

AN - SCOPUS:34047115370

SN - 1071-1023

VL - 25

SP - 410

EP - 414

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 2

ER -

High fidelity fabrication of microlens arrays by nanoimprint using conformal mold duplication and low-pressure liquid material curing

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