High-density regular arrays of nanometer-scale rods formed on silicon surfaces via femtosecond laser irradiation in water

Mengyan Shen, James E. Carey, Catherine H. Crouch, Maria Kandyla, Howard A. Stone, Eric Mazur

Research output: Contribution to journalArticlepeer-review

169 Scopus citations

Abstract

We report on the formation of high-density regular arrays of nanometer-scale rods using femtosecond laser irradiation of a silicon surface immersed in water. The resulting surface exhibits both micrometer-scale and nanometer-scale structures. The micrometer-scale structure consists of spikes of 5-10 μm width, which are entirely covered by nanometer-scale rods that are roughly 50 nm wide and normal to the surface of the micrometer-scale spikes. The formation of the nanometer-scale rods involves several processes: refraction of laser light in highly excited silicon, interference of scattered and refracted light, rapid cooling in water, roughness-enhanced optical absorptance, and capillary instabilities.

Original languageEnglish (US)
Pages (from-to)2087-2091
Number of pages5
JournalNano Letters
Volume8
Issue number7
DOIs
StatePublished - Jul 1 2008
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering

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