Green Lithography for Delicate Materials

Artem Grebenko, Anton Bubis, Konstantin Motovilov, Viacheslav Dremov, Evgeny Korostylev, Ivan Kindiak, Fedor S. Fedorov, Sergey Luchkin, Yuliya Zhuikova, Aleksandr Trofimenko, Gleb Filkov, Georgiy Sviridov, Andrey Ivanov, Jordan T. Dull, Rais Mozhchil, Andrey Ionov, Valery Varlamov, Barry P. Rand, Vitaly Podzorov, Albert G. Nasibulin

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