@inproceedings{e4f9f8fbd9ae4aeb875d4b136ea40679,
title = "Gradual Modulation of Semiconductor Properties via Grayscale Processing",
abstract = "We demonstrate a novel method of inducing a gradual change in semiconductor conductivity by combining grayscale processing of photoresist and proton implantation. This method is flexible and lends itself to many applications in semiconductor-based optical and electrical devices.",
author = "Sara Kacmoli and Carlo Holly and Gmachl, {Claire F.}",
note = "Publisher Copyright: {\textcopyright} 2020 OSA.; 2020 Conference on Lasers and Electro-Optics, CLEO 2020 ; Conference date: 10-05-2020 Through 15-05-2020",
year = "2020",
month = may,
language = "English (US)",
series = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2020 Conference on Lasers and Electro-Optics, CLEO 2020 - Proceedings",
address = "United States",
}